International Conference on Microelectronics, Nanoelectronics and Nanoengineering ICMNN on January 07-08, 2026 in Tokyo, Japan

Bio-nanotechnology & hybrid bio/solid state devices
Device characterization and modelling
Device physics and novel structures
DUV, immersion, EUV and X-ray lithography
DUV, VUV, EUV Lithography and Metrology
Electron and Ion Beam Lithography
Lithography and Related Technologies
Maskless Lithography
MEMS and Nanoelectronic Devices
Metrology and alignment
Micro and nano-scaled MEMS
Microelectronic Circuit Design
Microelectronic Device Electrical and Reliability Testing
Microelectronic Device Processing and Process Integration
Microsystem Technology and MEMS
Molecular and low-dimensional nano-electronics
Nanodevices
Nanoelectronics
Nanofabrication for energy sources
Nano-fabrication techniques
Nanoimprint lithography, embossing and soft lithography
Nanoimprint, Nanoprint and Rising Lithography
Nanomagnetic devices
Nanomaterials
Nanometer scale photonic devices
Nanoparticle synthesis and assembly
Nano-particle, synthesis and assembly
Nanotechnology
Nano-Tools
Novel ultrahigh density data storage devices
Optoelectronics
Optical tweezers
Packaging and surface mount technology
Photon- and charged-particle optics
Plasma etching and deposition
Reliability and failure analysis
Resist Materials and Processing
Resists and resist processing
Self-assembly and directed self-assembly
Semiconductor Packaging and Reliability
Silicon optimization
Simulation and computer aided design for the Nanoscale Era
Sub-half wavelength "super resolution" optical lithography